Modeling and Fabrication of low-cost RF MEMS

• Grant number: 12/18754-9
• Support Opportunities: Scholarships in Brazil - Scientific Initiation
• Effective date (Start): October 01, 2012
• Effective date (End): September 30, 2013
• Field of knowledge: Engineering - Electrical Engineering
• Principal Investigator: Gustavo Pamplona Rehder
• Grantee: Flavio Rene Miranda Pavan
• Host Institution: Escola Politécnica (EP). Universidade de São Paulo (USP). São Paulo , SP, Brazil
• Associated research grant: 11/18167-3 - RF MEMS for millimetric waves using commercial CMOS process, AP.JP

Abstract

The following undergraduate research project involves the modeling and fabrication of micro-electro-mechanical (MEMS) switch for radio frequency (RF) applications that will be integrated into selectable band patch filters. The goal is to continue previous studies, in which this type of device was designed and simulated, and first fabrication results were already obtained. This project is related to the FAPESP Young Researcher project (Process No. 2011/18167-3), which has among its objectives the development of micro-electro-mechanical systems (RF MEMS) for millimeter-wave applications. This work will be divided into two tasks to be developed simultaneously. In one, the MEMS switches will be modeled and their electromechanical and RF behaviors will be simulated. The other will be directed to the fabrication and testing of the switches. Initially, a lumped element model (mass-spring-damper) that will allow a better understanding of the RF MEMS switch behavior will be developed. In order to improve the model of lumped elements, a finite element model will also be developed and the results will be compared to electrical measurements of devices that will be manufactured. Finally, the switches will be incorporated into the developed RF MEMS filter and their behavior will be measured. Although this is an undergraduate research work, this research proposal has unique aspects and the expected results are relevant to the area in question, with concrete possibilities for dissemination in conferences or journals.(AU)