Testing and application of a new type of ion implanter

• Grant number: 13/10224-3
• Support Opportunities: Scholarships in Brazil - Doctorate (Direct)
• Start date: August 01, 2013
• End date: July 31, 2016
• Field of knowledge: Engineering - Materials and Metallurgical Engineering
• Principal Investigator: Maria Cecília Barbosa da Silveira Salvadori
• Grantee: Roman Spirin
• Host Institution: Instituto de Física (IF). Universidade de São Paulo (USP). São Paulo , SP, Brazil
• Associated research grant: 08/57706-4 - National Institute of Science and Technology on Organic Electronics (INEO), AP.TEM

Abstract

Roman Sperin is in course with his PhD project since March 2012. The student participated in the development of a new type of ion implanter that was part of a FAPESP project already concluded. Spirin has already partially characterized the new equipment and the present proposal is its final testing, including also the use of an application of the implanter in materials science. The objective of the tests are verifying if the ion beam is a neutral beam, which enables ion implantation into insulating samples, without accumulating positive charges, which would lead the sample to a different potential than planned. Thus, we propose to perform ion implantations, using the new implanter, at different energies, into insulating samples. The objective is to measure the depth profile of the implantation and compare with numerical simulations performed by TRIDYN. The methods of the samples characterization will be via RBS (Rutherford Backscattering Spectrometry), high-resolution scanning electron microscopy (Field Emission Gun Scanning Electron Microscopy) and transmission electron microscopy. The application of the implanter in materials science will be accomplished by surface modification of ceramic material, specifically titanium implantation into alumina in order to control the electrical conductivity of the surface. The results will be compared with theoretical model from the literature and previous works of the group. A possible application for this conductive ceramic surface will be of interest for particle accelerators and high-voltage insulators. (AU)

Academic Publications

(References retrieved automatically from State of São Paulo Research Institutions)

SPIRIN, Roman. Tesis and application of new ion implanter.. 2016. Doctoral Thesis - Universidade de São Paulo (USP). Escola Politécnica (EP/BC) São Paulo.