Optimization of manufactured RF MEMS in CMOS technology for millimeter wave applications

• Grant number: 14/18011-1
• Support Opportunities: Scholarships in Brazil - Scientific Initiation
• Start date: November 01, 2014
• End date: August 31, 2015
• Field of knowledge: Engineering - Electrical Engineering
• Principal Investigator: Gustavo Pamplona Rehder
• Grantee: Otavio Augusto Dantas Molitor
• Host Institution: Escola Politécnica (EP). Universidade de São Paulo (USP). São Paulo , SP, Brazil
• Associated research grant: 11/18167-3 - RF MEMS for millimetric waves using commercial CMOS process, AP.JP

Abstract

The present work intends to enhance the performance of the phase shifters in development at LME through mechanical optimization of these RF MEMS. For this, the position of the stoppers will be varied to optimize the displacement of the strips of the shielding layer. After, the RF operation of the devices will be optimized, and new devices will be sent to the foundry for manufacturing. The post process will be done at LME and the electrical measurements in IMEP-LAHC (France).