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Optimization of manufactured RF MEMS in CMOS technology for millimeter wave applications

Grant number: 14/18011-1
Support type:Scholarships in Brazil - Scientific Initiation
Effective date (Start): November 01, 2014
Effective date (End): August 31, 2015
Field of knowledge:Engineering - Electrical Engineering
Principal Investigator:Gustavo Pamplona Rehder
Grantee:Otavio Augusto Dantas Molitor
Home Institution: Escola Politécnica (EP). Universidade de São Paulo (USP). São Paulo , SP, Brazil
Associated research grant:11/18167-3 - RF MEMS for millimetric waves using commercial CMOS process, AP.JP


The present work intends to enhance the performance of the phase shifters in development at LME through mechanical optimization of these RF MEMS. For this, the position of the stoppers will be varied to optimize the displacement of the strips of the shielding layer. After, the RF operation of the devices will be optimized, and new devices will be sent to the foundry for manufacturing. The post process will be done at LME and the electrical measurements in IMEP-LAHC (France).