Power source for thin film deposition by magnetron sputtering in kHz: measurement system for voltage, current and power

• Grant number: 19/20980-6
• Support Opportunities: Scholarships in Brazil - Innovative Research in Small Business - PIPE
• Start date: August 01, 2019
• End date: April 30, 2020
• Field of knowledge: Engineering - Electrical Engineering - Electrical, Magnetic and Electronic Circuits
• Principal Investigator: Wagner Henrique Rabelo
• Grantee: Wagner Henrique Rabelo
• Company: Intersecta Engenharia Ltda
• CNAE: Fabricação de equipamentos e aparelhos elétricos não especificados anteriormente
• Associated research grant: 18/22595-0 - Power source for thin film deposition by magnetron sputtering in kHz - measurement system: voltage, current and power, AP.PIPE