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Power source for thin film deposition by magnetron sputtering in kHz: measurement system for voltage, current and power

Grant number: 19/20980-6
Support Opportunities:Scholarships in Brazil - Innovative Research in Small Business - PIPE
Effective date (Start): August 01, 2019
Effective date (End): April 30, 2020
Field of knowledge:Engineering - Electrical Engineering - Electrical, Magnetic and Electronic Circuits
Principal Investigator:Wagner Henrique Rabelo
Grantee:Wagner Henrique Rabelo
Host Company:Intersecta Engenharia Ltda
CNAE: Fabricação de equipamentos e aparelhos elétricos não especificados anteriormente
Associated research grant:18/22595-0 - Power source for thin film deposition by magnetron sputtering in kHz - measurement system: voltage, current and power, AP.PIPE
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