| Full text | |
| Author(s): |
da Silva, Ricardo M. L.
;
Albano, Luiz G. S.
;
Vello, Tatiana P.
;
de Araujo, Wagner W. R.
;
de Camargo, Davi H. S.
;
Palermo, Leirson D.
;
Correa, Catia C.
;
Woell, Christof
;
Bufon, Carlos C. B.
Total Authors: 9
|
| Document type: | Journal article |
| Source: | ADVANCED ELECTRONIC MATERIALS; v. N/A, p. 12-pg., 2022-05-17. |
| Abstract | |
The miniaturization of electronic devices highlights the need for robust low-kappa materials as an alternative to prevent losses in the performance of integrated circuits. For it, surface-supported metal-organic frameworks (SURMOFs), a class of porous-hybrid materials, may cover such a demand. However, the high-intrinsic porosity makes determining the dielectric properties difficult and promotes the integration of SURMOF thin films. Here, the integration of ultrathin HKUST-1 SURMOF films into a 3D functional device architecture using soft-top electrical contacts is addressed. In this novel approach, the device structure assumes an ultracompact capacitor structure allowing determine the dielectric properties of porous thin films with considerable accuracy. A low-kappa value of 2.0 +/- 0.5 and robust breakdown strength of 2.8 MV cm(-1) are obtained for films below 80 nm. The spontaneous self-encapsulated structure provides a footprint-area reduction of up to 90% and yields good protection for the SURMOF toward different hazardous exposure. Finite-element calculations compare the HKUST-1 performance as dielectric layer with well-established insulators applied in electronics (SiO2 and Al2O3). The possibility of integration and miniaturization of HKUST-1, combined with their interesting insulating properties, place this hybrid material as a robust low-k dielectric for novel electronics. (AU) | |
| FAPESP's process: | 16/25346-5 - Capacitive devices for hybrid nanostructures characterization: study of electrical properties of surface metal-organic frameworks -SURMOFs- and metallophthalocyanines |
| Grantee: | Tatiana Parra Vello |
| Support Opportunities: | Scholarships in Brazil - Doctorate |
| FAPESP's process: | 14/25979-2 - Fabrication and characterization of devices and systems based on hybrid nanomembranes |
| Grantee: | Carlos César Bof Bufon |
| Support Opportunities: | Research Grants - Young Investigators Grants |
| FAPESP's process: | 17/02317-2 - Interfaces in materials: electronic, magnetic, structural and transport properties |
| Grantee: | Adalberto Fazzio |
| Support Opportunities: | Research Projects - Thematic Grants |
| FAPESP's process: | 17/25553-3 - Fabrication and characterization of self-rolled up nanomembranes of surface-supported metal-organic frameworks (SURMOFs) for applications in ultracompact electronic devices |
| Grantee: | Luíz Gustavo Simão Albano |
| Support Opportunities: | Scholarships in Brazil - Post-Doctoral |
| FAPESP's process: | 14/50906-9 - INCT 2014: in Functional Complex Materials |
| Grantee: | Fernando Galembeck |
| Support Opportunities: | Research Projects - Thematic Grants |