Optimization of RF MEMS Phase Shifter for microwaves applications

Author(s)

Bovadilla, R. G. ; Molitor, O. D. ; Serrano, A. L. C. ; Rehder, G. P. ; IEEE

• Document type: Journal article
• Source: 2017 32ND SYMPOSIUM ON MICROELECTRONICS TECHNOLOGY AND DEVICES (SBMICRO): CHIP ON THE SANDS; v. N/A, p. 4-pg., 2017-01-01.

Abstract

There is currently a demand for millimeter wave (mmW) high data-rate communication systems that present characteristics such as small area, low power consumption and low cost. In this paper a 3-bit phase shifter design based on distributed microelectromechanical systems (MEMS) and slow-wave coplanar transmission lines (S-CPW) is proposed. The phase shifter was designed following the design rules of the AMS 0,35 mu m CMOS technology. The results for mechanical simulations in Ansys Workbench (TM), electromagnetic simulations in Ansys HFSS (TM) and circuit simulations in Agilent ADS (TM) are shown and commented. The simulations return a high figure of merit of 176 degrees/dB with an area of 0.37mm(2). Finally, the layout done in the Cadence Virtuoso (TM) has been sent to a foundry and the results of the measurements made on the fabricated device are also shown in the article. (AU)

• FAPESP's process: 11/18167-3 - RF MEMS for millimetric waves using commercial CMOS process
• Grantee: Gustavo Pamplona Rehder
• Support Opportunities: Research Grants - Young Investigators Grants
• FAPESP's process: 12/15159-2 - High performance and lowcost MnM devices for millimeter-wave applications from 30 to 110 GHz
• Grantee: Ariana Maria da Conceicao Lacorte Caniato Serrano
• Support Opportunities: Research Grants - Young Investigators Grants