Multiuser equipment approved in grant 2012/50259-8: e-beam evaporator

• Grant number: 18/23379-9
• Support Opportunities: Multi-user Equipment Program
• Start date: December 01, 2018
• End date: November 30, 2025
• Field of knowledge: Engineering - Electrical Engineering - Electrical, Magnetic and Electronic Measurements, Instrumentation
• Principal Investigator: Eunezio Antonio de Souza
• Grantee: Eunezio Antonio de Souza
• Host Institution: Instituto Mackenzie de Pesquisas em Grafeno e Nanotecnologias (Mackgraphe). Universidade Presbiteriana Mackenzie (UPM). São Paulo , SP, Brazil
• Associated research grant: 12/50259-8 - Graphene: photonics and opto-electronics: UPM-NUS collaboration, AP.SPEC
• EMU web page: https://www.mackenzie.br/mackgraphe/laboratorio-multiusuario
• Type of equipment: Processos Físicos - Modificação superfícies – etching - Feixes iônicos; Processos Físicos - Litografia - Feixes de elétrons
• Manufacturer: Mbraun
• Model: MB Provap Ebeam

Abstract

The e-beam type evaporator will enable the microfiber processes of the photonic devices integrated to the two-dimensional materials, such as graphene and dicalcogenetos of transition metals. In this way, the e-beam evaporator will allow the deposition of metallic contacts in electro-optic field-effect devices, these being one of the main applications sought in the Project SPEC- Photonic in graphene (AU)