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Optical, mass and electrostatic investigation of polymerizing plasmas generated by the ethylene glicol ether and oxazoline families: polymeric deposition

Abstract

In this work it will be investigated polymerizing plasmas generated from the families of the monomers of ethylene-glycol ether and oxazoline in order to analyze chemistry composition of the plasma together with physical properties. The techniques of optical emission spectroscopy, mass spectrometry and electrostatic measurements will be utilized with the view to understand the chemical kinetic behavior of the plasma when parameters like operating pressure and applied power are changed. Films will be deposited on a few kinds of substrates in order to investigate the molecular structure, chemical composition and deposition rate of the polymers. For these purposes, perfilometric technique, infrared spectroscopy, X-ray photoelectron spectroscopy will be used. It will be made a parallel between the chemical species of the plasmas and the chemical composition and structure of the polymers to improve the processes. (AU)

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VEICULO: TITULO (DATA)
VEICULO: TITULO (DATA)