Deposition and characterization of BST aiming the fabrication of 60 GHz intelligent phase shifters.

• Grant number: 12/07048-6
• Support Opportunities: Scholarships in Brazil - Doctorate
• Start date: July 01, 2012
• End date: December 31, 2015
• Field of knowledge: Engineering - Electrical Engineering - Electrical Materials
• Principal Investigator: Ines Pereyra
• Grantee: Marcus Vinicius Pelegrini
• Host Institution: Escola Politécnica (EP). Universidade de São Paulo (USP). São Paulo , SP, Brazil

Abstract

This project aims the fabrication and characterization of thin films of barium strontium titanate (BST), obtained by reactive magnetron sputtering, to explore its ferroelectric characteristics in the manufacturing of electromechanical microsystems (MEMS), more precisely ,60GHz tunable phase shifters, based on coplanar waveguides.

Academic Publications

(References retrieved automatically from State of São Paulo Research Institutions)

PELEGRINI, Marcus Vinicius. Deposition and characterization of barium strontium titanate thin films (Ba0,5Sr0,5(TiO3)) aiming its use in phase shifter fabrication working at 60 GHz.. 2016. Doctoral Thesis - Universidade de São Paulo (USP). Escola Politécnica (EP/BC) São Paulo.