This work aims the development of piezoresistive sensors based on doped DLC thin films with different elements that allows its applications on hard environments. The thin films will be deposited by sputtering technique. The influence of the control variables of the deposition reactor on the thin films properties will be study. The thin films that present better characteristics will be selected and their piezoresistive properties will be studied in order to fabricate piezoresistive sensors.
News published in Agência FAPESP Newsletter about the scholarship: