Fabrication and characterization of piezoresistive sensors based on DLC thin films

• Grant number: 13/17045-7
• Support Opportunities: Scholarships in Brazil - Doctorate
• Start date: November 01, 2013
• End date: March 31, 2017
• Field of knowledge: Engineering - Electrical Engineering - Electrical, Magnetic and Electronic Measurements, Instrumentation
• Principal Investigator: Marcos Massi
• Grantee: Gabriela Leal
• Host Institution: Instituto de Ciência e Tecnologia (ICT). Universidade Federal de São Paulo (UNIFESP). Campus São José dos Campos. São José dos Campos , SP, Brazil

Abstract

This work aims the development of piezoresistive sensors based on doped DLC thin films with different elements that allows its applications on hard environments. The thin films will be deposited by sputtering technique. The influence of the control variables of the deposition reactor on the thin films properties will be study. The thin films that present better characteristics will be selected and their piezoresistive properties will be studied in order to fabricate piezoresistive sensors.

Scientific publications

(4)

(References retrieved automatically from Web of Science and SciELO through information on FAPESP grants and their corresponding numbers as mentioned in the publications by the authors)

RASIA, LUIZ ANTONIO; LEAL, GABRIELA; KOBERSTEIN, LEANDRO LEO; FURLAN, HUMBER; MASSI, MARCOS; FRAGA, MARIANA AMORIM; FIGUEROAGARCIA, JC; LOPEZSANTANA, ER; FERROESCOBAR, R. Design and Analytical Studies of a DLC Thin-Film Piezoresistive Pressure Microsensor. APPLIED COMPUTER SCIENCES IN ENGINEERING, v. 742, p. 11-pg., 2017-01-01. (13/17045-7, 14/18139-8)

CARDOSO, G. W. A.; LEAL, G.; MASSI, M.; DA SILVA SOBRINHO, A. S.; LIBARDI, J.; IEEE. The influence of aluminum incorporation on the Structural and Electrical Properties of ZnO Thin Films For Applications in Piezoresistive Sensors. 2017 32ND SYMPOSIUM ON MICROELECTRONICS TECHNOLOGY AND DEVICES (SBMICRO): CHIP ON THE SANDS, v. N/A, p. 4-pg., 2017-01-01. (13/17045-7)

LEAL, GABRIELA; CAZALINI, ELISA M.; COSTA, DANIEL S.; CARDOSO, GUILHERME W. A.; MOTTA JUNIOR, JOSE ANDRE; GOMES, MARIANY L. M.; MESSMER, NIGEL R.; BRAZIL, TAYRA R.; GIACOMELLI, VALDERCI J.; REZENDE, MIRABEL C.. The influence of morphological and structural aspects of synthetic graphites used in the aerospace area on their electrical and mechanical properties. MATERIALS RESEARCH EXPRESS, v. 5, n. 10, OCT 2018. (13/17045-7)

LEAL, G.; FRAGA, M. A.; RASIA, L. A.; MASSI, M.. Impact of high N-2 flow ratio on the chemical and morphological characteristics of sputtered N-DLC films. SURFACE AND INTERFACE ANALYSIS, v. 49, n. 2, p. 99-106, FEB 2017. (14/18139-8, 11/50773-0, 13/17045-7)