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Analysis of the Substrate Bias Effect on the Thermal Properties of SOI UTBB Transistors

Author(s):
Costa, Fernando J. ; Pavanello, Marcelo A. ; Trevisoli, Renan ; Doria, Rodrigo T. ; IEEE
Total Authors: 5
Document type: Journal article
Source: 2017 32ND SYMPOSIUM ON MICROELECTRONICS TECHNOLOGY AND DEVICES (SBMICRO): CHIP ON THE SANDS; v. N/A, p. 4-pg., 2017-01-01.
Abstract

This work presents an analysis of the thermal resistance of Ultra-Thin Body and Buried Oxide (UTBB) SOI (Silicon-on-Insulator) MOSFETs (Metal Oxide Semiconductor Field Effect Transistor) under a selected set of back gate biases (V-sub), with and without considering the effect of the ground plane. It has been shown that the thermal resistance increases as the substrate bias is reduced. For negative V-sub, a thicker depletion depth is induced by the back gate, confining the overall current closer to the front gate and increasing its density. A thermal resistance reduction of about 8-9% can be obtained by simply increasing the back bias from -2V up to 2 V. (AU)

FAPESP's process: 14/18041-8 - Electrical characterization and modeling of advanced electronic devices
Grantee:Renan Trevisoli Doria
Support Opportunities: Scholarships in Brazil - Post-Doctoral