Ar/Cl-2 etching of GaAs optomechanical microdisks fabricated with positive electroresist

Author(s)

Benevides, Rodrigo ^{[1, 2]} ; Menard, Michael ^[3] ; Wiederhecker, Gustavo S. ^{[1, 2]} ; Mayer Alegre, Thiago P. ^{[1, 2]}

Affiliation

^[1] Univ Estadual Campinas, Gleb Wataghin Phys Inst, Appl Phys Dept, BR-13083859 Campinas, SP - Brazil

^[2] Univ Estadual Campinas, Photon Res Ctr, BR-13083859 Campinas, SP - Brazil

^[3] Univ Quebec Montreal, Dept Comp Sci, Montreal, PQ H2X 3Y7 - Canada

• Document type: Journal article
• Source: OPTICAL MATERIALS EXPRESS; v. 10, n. 1, p. 57-67, JAN 1 2020.
• Web of Science Citations: 0

Abstract

A method to fabricate GaAs microcavities using only a soft mask with an electrolithographic pattern in an inductively coupled plasma etching is presented. A careful characterization of the fabrication process pinpointing the main routes for a smooth device sidewall is discussed. Using the final recipe, optomechanical microdisk resonators are fabricated. The results show very high optical quality factors of Q(opt) > 2 x 10(5), among the largest already reported for dry-etching devices. The final devices are also shown to present high mechanical quality factors and an optomechanical vacuum coupling constant of g(0) = 2 pi x 13.6 kHz enabling self-sustainable mechanical oscillations for an optical input power above 1 mW. (C) 2019 Optical Society of America under the terms of the OSA Open Access Publishing Agreement (AU)

• FAPESP's process: 12/17765-7 - Nanophotonics in Group IV and III-V semiconductors
• Grantee: Gustavo Silva Wiederhecker
• Support type: Research Grants - Young Investigators Grants
• FAPESP's process: 16/18308-0 - Quantum optomechanics in microcavities
• Grantee: Rodrigo da Silva Benevides
• Support type: Scholarships in Brazil - Doctorate
• FAPESP's process: 18/15577-5 - Nonlinear nanophotonics circuits: building blocks for optical frequency synthesis, filtering and signal processing
• Grantee: Gustavo Silva Wiederhecker
• Support type: Research Grants - Young Investigators Grants - Phase 2
• FAPESP's process: 19/01402-1 - Integrated acoustic waveguides at single-phonon level
• Grantee: Rodrigo da Silva Benevides
• Support type: Scholarships abroad - Research Internship - Doctorate
• FAPESP's process: 12/17610-3 - Optomechanics in photonic and phononic crystals
• Grantee: Thiago Pedro Mayer Alegre
• Support type: Research Grants - Young Investigators Grants
• FAPESP's process: 18/15580-6 - Optomechanical cavities towards single photon strong coupling
• Grantee: Thiago Pedro Mayer Alegre
• Support type: Research Grants - Young Investigators Grants - Phase 2