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(Reference retrieved automatically from Web of Science through information on FAPESP grant and its corresponding number as mentioned in the publication by the authors.)

Ar/Cl-2 etching of GaAs optomechanical microdisks fabricated with positive electroresist

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Author(s):
Benevides, Rodrigo [1, 2] ; Menard, Michael [3] ; Wiederhecker, Gustavo S. [1, 2] ; Mayer Alegre, Thiago P. [1, 2]
Total Authors: 4
Affiliation:
[1] Univ Estadual Campinas, Gleb Wataghin Phys Inst, Appl Phys Dept, BR-13083859 Campinas, SP - Brazil
[2] Univ Estadual Campinas, Photon Res Ctr, BR-13083859 Campinas, SP - Brazil
[3] Univ Quebec Montreal, Dept Comp Sci, Montreal, PQ H2X 3Y7 - Canada
Total Affiliations: 3
Document type: Journal article
Source: OPTICAL MATERIALS EXPRESS; v. 10, n. 1, p. 57-67, JAN 1 2020.
Web of Science Citations: 0
Abstract

A method to fabricate GaAs microcavities using only a soft mask with an electrolithographic pattern in an inductively coupled plasma etching is presented. A careful characterization of the fabrication process pinpointing the main routes for a smooth device sidewall is discussed. Using the final recipe, optomechanical microdisk resonators are fabricated. The results show very high optical quality factors of Q(opt) > 2 x 10(5), among the largest already reported for dry-etching devices. The final devices are also shown to present high mechanical quality factors and an optomechanical vacuum coupling constant of g(0) = 2 pi x 13.6 kHz enabling self-sustainable mechanical oscillations for an optical input power above 1 mW. (C) 2019 Optical Society of America under the terms of the OSA Open Access Publishing Agreement (AU)

FAPESP's process: 12/17765-7 - Nanophotonics in Group IV and III-V semiconductors
Grantee:Gustavo Silva Wiederhecker
Support type: Research Grants - Young Investigators Grants
FAPESP's process: 16/18308-0 - Quantum Optomechanics in Microcavities
Grantee:Rodrigo da Silva Benevides
Support type: Scholarships in Brazil - Doctorate
FAPESP's process: 18/15577-5 - Nonlinear nanophotonics circuits: building blocks for optical frequency synthesis, filtering and signal processing
Grantee:Gustavo Silva Wiederhecker
Support type: Research Grants - Young Investigators Grants - Phase 2
FAPESP's process: 19/01402-1 - Integrated acoustic waveguides at single-phonon level
Grantee:Rodrigo da Silva Benevides
Support type: Scholarships abroad - Research Internship - Doctorate
FAPESP's process: 12/17610-3 - Optomechanics in photonic and phononic crystals
Grantee:Thiago Pedro Mayer Alegre
Support type: Research Grants - Young Investigators Grants
FAPESP's process: 18/15580-6 - Optomechanical cavities towards single photon strong coupling
Grantee:Thiago Pedro Mayer Alegre
Support type: Research Grants - Young Investigators Grants - Phase 2