Effects of ion implantation on complex amorphous thin films produced by plasma enh...
Characterization of surfaces chlorinated in plasmas and chlorinated thin films dep...
Characterization of thin amorphous films produced by chemical vapor deposition
Deposition of DLC (Diamond Like Carbon) films on tool steel AISI D2 and AISI H13, ...
Studies and development of a PE-CVD system with use of additional cathode for depo...