Characterization of thin amorphous films produced by chemical vapor deposition

• Grant number: 05/02797-7
• Support Opportunities: Regular Research Grants
• Start date: January 01, 2006
• End date: March 31, 2008
• Field of knowledge: Engineering - Materials and Metallurgical Engineering - Nonmetallic Materials
• Principal Investigator: Steven Frederick Durrant
• Grantee: Steven Frederick Durrant
• Host Institution: Universidade Estadual Paulista (UNESP). Campus Experimental de Sorocaba. Sorocaba , SP, Brazil

Abstract

Additional material to permit the construction of a system for the Chemical Vapor Deposition of thin films is solicited. The system will consist of a vacuum chamber fitted with electrodes fed rf power, and fed gases via precision mass flow controllers. Series of a-C:N:H and a-C:O:H films will be deposited and their chemical composition and structure examined together with their mechanical and optical properties. Fundamental studies of films deposited from vapors of acetone and ether are also proposed. (AU)