Microfabrication and optimization of silicon nitride optical resonators
Scientific MUE: acquisition of a 100 kV electron beam nanolithography system for h...
Electron beam lithography optimization waveguides and optical cavities microfabric...
Microfabrication and optimization of lithium niobate integrated optical cavities
Multi-user Equipment approved in grant 2018/03474-7: chemical-mechanical polishing...